A Multidisciplinary Introduction to MicrofabricationFunded by the National Science Foundation under grant number DUE 0942672
Microfabrication, the processes of fabrication of miniature structures of micrometer sizes and smaller, is heavily used to make both electronic devices like integrated circuits and semiconductor chips, and other sorts of devices like accelerometers, lasers, and miniature microphones. It is no longer just microelectronics, but a very general area. It includes the use of a variety of specialized tools and the methodology to design a process, using those tools, to fabricate a desired device.
Supported by the National Science Foundation CCLI Grant 0942672, we are integrating microfabrication content and concepts into thrice undergraduate curriculum across several disciplines in Engineering and Science.