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Rapid Thermal Processing

RTP

Tungsten-halogen lamps

250 – 1300°C

Ramp rate up to 150°C per second

O2 and N2

Ambient pressure

Oxidation, Nitridation of metals

Computer controlled

 

Binghamton University State University of New York
PO BOX 6000   Binghamton, NY 13902-6000

Last Updated: 10/26/16