Electron Microscopy Suite

The Electron Microscopy Suite contains multiple advanced Scanning Electron Microscopes (SEM), a Transmission Electron Microscope (TEM), and a dual beam Focused Ion Beam (FIB-SEM) system to enable nano-scale structural, compositional, chemical, and crystallographic analysis. Energy Dispersive Spectroscopy (EDS), Wavelength Dispersive Spectroscopy (WDS), and Electron Energy Loss Spectroscopy (EELS) are available on several systems for elemental analysis and mapping. In addition, two systems have Electron Back Scattered Diffraction (EBSD) detectors for crystal orientation measurement and mapping, and two systems are equipped with a STEM detector.

The suite includes the following instrumentation:

  • SEMs

    Ultra-High Resolution FE-SEM — Hitachi Su5000

    + EDS
    + WDS

    Ultra-High Resolution FE-SEM — Zeiss Supra 55 VP

    + EDS — EDAX Genesis
    + EBSD

    LaB6 Emitter Environmental SEM — Zeiss EVO-50 XVP

    + EDS — Oxford Inca

  • FIB-SEM

    Dual-Beam FIB-SEM — FEI NanoLab 600

    + EDS — Oxford
    + EBSD

  • TEM

    200-kV FE-TEM — JEOL 2100F

    + EDS
    + EELS

  • Prep Tools

    Carbon Coater — Cressington 208C

    Metal Coater — Cressington 208HR