The Electron Microscopy Suite contains multiple advanced Scanning Electron Microscopes (SEM), a Transmission Electron Microscope (TEM), and a dual beam Focused Ion Beam (FIB-SEM) system to enable nano-scale structural, compositional, chemical, and crystallographic analysis. Energy Dispersive Spectroscopy (EDS), Wavelength Dispersive Spectroscopy (WDS), and Electron Energy Loss Spectroscopy (EELS) are available on several systems for elemental analysis and mapping. In addition, two systems have Electron Back Scattered Diffraction (EBSD) detectors for crystal orientation measurement and mapping, and two systems are equipped with a STEM detector.
The suite includes the following instrumentation:
