Stylus profiler is used to measure step height, feature height and width, etch depth, film thickness and surface roughness. ADL has a Dektak 8 system from Bruker, which can accommodate up to 8-inch diameter and 1-inch thick samples. Its capabilities include:
- 2D surface profile measurements with single and automated multi line-scans
- Vertical Scan Range of up to 1 mm
- Scan length up to 200 mm
- Better than 1 nm resolution in height
- Lateral Resolution: up to 1μm or better
- Programmable stage with x, y, theta positioning
- Styli Available: 50 nm, 200 nm, 800 nm, 5μm, 12.5μm, 25μm radius
Instrument Manager: Anju Sharma
