Rapid Thermal Processor
Modular Processing Technologies RTP-600S
Wafer Size: 4 inches to 6 inches
Temperature Range: 250-1300 degrees C
Steady state time 1-600sec
Shorter at higher temps
2 sec at 1300C
Ramp Rate: 0-150 deg. C/sec
Atmospheric pressure
O2 and N2 atmospheres
