Azores 6600 Photolithography Tool
The Flex Tech Alliance funded project to Azores Corporation of Wilmington, Massachusetts
to adopt its Model 5200 Panel Printer stepper to handle and process plastic web material
was completed and delivered to CAMM in April 2007. This system has a resolution below
4 microns, with an overlay capability below 1 micron, and the unique capability of
compensating for non-isotropic distortions of up to ±400ppm. The system is expected
to expose over 1100cm2 of area per minute. Although the system platform and material
handling is designed to handle webs up to 24" wide, the system was first configured
with a vacuum chuck to handle 8" wide webs. The system was recently upgraded with
Northfield Automation web handlers.
